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߼w܅

2017/9/6 15:52:19 ߣ՚^V Դ

и߼ߝĚwͨ^·ݔ͵OcPOU_ˇw|ҪښwָһrtҕϵyIJxúʩ|ȡQƚOľں̶ܴܵ·ϵyTصӰܲĵxȡPИIԭtڈDעܵ|  

    ·IJ|tʹõMxƳõķwtxߵȼ316L EP늽⒁(Electro-Polish)̎͸gֲڶȵRmax(maximum peak to valley height)s0.3mֵhڽ^xY(Bright Anneal)֮̎316L BAܵ0.8mƽԽԽγ΢uȾӎ316L BA܄tʹںоƬ|cƳ̷ĚwGN2CDA܃ȱֲڶǺܲ|Ę˜ֲڶԽwyԴ󽵵һNδ̎AP(Annealing & Picking)tڲ鹩·pĿǰڇȝܵɅ՘˜ʱ^ͨ҂˅աSOӋҎվOӋҎվOӋҎs՚OӋҎPgИIgҎژI҂TõxcһㅢՇHͨõИI˜ʣ  

    ڰ댧wwИIԽԽС䌦wws|¶cҪҲԽԽ1ǸŒҪ  

߼⣨PN2ϵyܵÃȱ늽⒁⣨EP̼316LP䓹yTͬ|IJyyĤy 

 

⣨N2ϵyܵÃȱ늽⒁⣨EP̼316LP䓹ܻ˻BA̼316LP䓹yTͬ|IJyyy

 

 ߼⣨PH2⣨H2ϵyܵÃȱ늽⒁⣨EP̼316LP䓹yTͬ|IJyyĤy⣨ArϵyܵÃȱ늽⒁⣨EP̼316LP䓹yTͬ|IJyyĤy

 

⣨HeϵyܵÃȱ늽⒁⣨EP̼316LP䓹ܣyTͬ|IJyyĤy

 

ؚϵyҪ߀p׹ܣϴgAP̎ȹ늽⒁⣨EPyTͬ|IJyyĤys՚⣨CDAϵyܵù˻BA̼316LP䓹yTͬ|yҪ󲻸ߵĹ˾ɲ~ҕˇҪ󶨣

    wvwƷNжкwԭһC_һ߰bMϺ;SMôͶYɱе߀ڹˇgй©İȫ[FڏVüйϵyԿϵyГQ߶^ؚgҲcˇgxgзҪİȫԴ  

 

    ᘌgȼԵĚwͨOӋƿښƿ(Gas Cabinet)͸^·wFy(VMB, Valve Manifold Box)MƳ̙C_ʹc(POU, Point of Use)MC_ǻw֮ǰЪĚwƱP(GB, Gas Box)cƳ̿ģK“C|(MFC, Mass Flow Controller)M֮cMĻϱͨ˚wƱPڏSϵyOӋǚwƳ̙C_OһһĶԚwt_ʽĚƿ(Gas Rack)cyP(VMP, Valve Manifold Panel)Mй 


P䓹ܼܵyTĶx  

    ;P䓝ܵݔͰ댧wIи߼򳬼wˎaIНܵNˮ ̎ʽ 

 RA ֵı^Roughness Average,ֲڶƽֵ 

|        ̎ʽ        ȱֲڶƽֵum 

316L        AP                 RA=1.0 

316L        BA                 RA=0.8

316L        EP                 RA=0.13-0.2   

    ܼgǸ߼wϵyҪMɲܷ񌢺ϷҪĸ߼wÚcԱ|ϸPIg^߼ܼgϵy_OӋܼxʩbԇyԇȃԴҎģ·΢ӮaƷa߼wļȺs|Ҫʹ߼wܼgܵPעҕᘌ߼wݔ͏xĵʩԼճεĸ 


ҊwķN

ИIгҊwķ

 

ͨwҲQښw Bulk gas ⣨H2⣨N2⣨O2⣨A2طNwSpecialty gas Ҫ SiH4 PH3 B2H6 A8H3 CL HCL CF4 NH3 POCL3 SIH2CL2 SIHCL3 NH3 BCL3 SIF4 CLF3 CO C2F6 N2O F2 HF HBR SF6ȵ

 

wķNһɷ֞鸯gȼȼԵһ㳣õİ댧ww£

(һ)g / ԣHCl BF3 WF6HBrSiH2Cl2NH3 PH3Cl2 BCl3  

()ȼԣH2 CH4 SiH4PH3AsH3SiH2Cl2B2H6CH2F2CH3FCO

 

()ȼԣO2Cl2N2ONF3

 

()ԣN2CF4C2F6C4F8SF6CO2NeKrHeȰ댧wwܶnjwк؄eЩwSiH4ȼֻҪһй©͕c՚еҷ_ʼȼ߀AsH3ĄκЩ΢й©ˆTΣҲ@Щ@ҊΣUԌϵyOӋȫԵҪ؄e 

    

wđ÷     

 

    waƷFIҪĻAԭ÷ʮ֏VұFʯCеմʳƷӹtˎtȲTʹôijÚwطNwwđ؄e@ЩIĸ¼gҪӰ䲻ȱٵԭϚˇҲֻиNdITͬFƌWgҪƄwIaƷƷN|͔ȷõwSlչ

 

    w΢댧wИIБÚwʹڰ댧wƳһֱҪĽɫ؄eǰ댧wƳĿǰѱVđڸ헮aIeyULSITFT-LCDFڵ΢C(MEMS)aI^İ댧wƳ̞aƷеƳ̰gxӲֲĤeȽʹõஔĚwwļȄtMaƷQԵӰwİȫԄtPˆTĽcS\İȫ߼ܵڸ߼wݔеxڲP۟Ʋ^ÿմs200gĚwP䓲ļӹꮅHճиNȾپҲһĚw·Кͨ^r@֚wMȾw܃Ț鲻BmӕrܲČͨ^Ěwγɉֹͣͨ^rܲĚwγɽĚwͬs|M܃ȼwͬrܶʼʹùܲăȱҲaһķĩ@NٷۉmͬȾ܃ȼĚwܲĵ@һPҪ˴_ݔ͵ĚwļHҪܲăȱһOߵĹ⻬кܸߵĥ

    g^Ěwrx͸gIJP䓹ܲtܲČڸgڃȱagؕrFƬلxĶȾݔļwĸ߼ߝȚwݔܵBԭtȫúҪõĹܲʩrMl׃̼^ߵIJںӕrܺӲλ͸ʹù܃w໥B͸Ɖݔ͚wļȺ͝҂ĸŬȫʧȥxCڸ߼wطNwݔ͹ܵһNطN̎ĸ߼P䓹ʹ߼ܵϵyܼܵyTVMBVMPڸ߼wռPҪʹ

 

ݔܵgһ

 

    ߼wwݔָܵݔ͚wġȡһҪwȣws|յĺͨÚwȵİٷ֔ʾ99.9999%,Ҳs|պweppm ppb pptʾȣw΢ˮֵĺQ֮ͨ¶cʾ糣¶c-70ȣwкȾӵĔµm/M3 ʾډs՚ͨҲòɱĹw

mg/m3ʾкw˺

 

    ȾСȾҪָܵ_ˢĥpgaĽ⟟mԼ΢ɾwԼw۵ҺεĴС֞飺

 

a)ӡ5m 

b)ӡϏ0.1m-5m֮g

c)΢ӡС0.1m

һƪIc҅^e  

һƪ{CMx

c@oҰlϢ
c@oҰlϢ
c@oҰlϢ
c@oҰlϢ
Ʒyw߹ۿ